| 引用本文： |
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桂柳成,邹华红,程蕾,胡坤.二氧化硅微球场发射环境扫描电镜形貌测试条件研究[J].广西科学院学报,2010,26(3):349-353. [点击复制]
- GUI Liu-cheng,ZOU Hua-hong,CHENG Lei,HU Kun.Research on Field Environmental Scanning Electron Microscope Observation Conditions of SiO2 Micro-ball[J].Journal of Guangxi Academy of Sciences,2010,26(3):349-353. [点击复制]
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| 摘要: |
| 以二氧化硅微球作为研究对象,室温下采用场发射环境扫描电镜(FEI Quanta 200),选用二次电子(SE)成像进行SEM观察。分别考察镀膜处理、加速电压、束斑变化、扫描速度、工作距离等参数对图像质量的影响。 |
| 关键词: 图像质量 二氧化硅微球 镀膜 加速电压 束斑变化 扫描速度 工作距离 |
| DOI： |
| 投稿时间：2010-06-12 |
| 基金项目: |
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| Research on Field Environmental Scanning Electron Microscope Observation Conditions of SiO2 Micro-ball |
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GUI Liu-cheng, ZOU Hua-hong, CHENG Lei, HU Kun
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| (Key Laboratory for the Chemistry and Molecular Engineering of Medicinal Resources(Ministry of Education of China), School of Chemistry & Chemical Engineering of Guangxi Normal University, Guilin, Guangxi, 541004, China) |
| Abstract: |
| SiO2 micro-ball was studied by Field Environmental Scanning Electron Microscope with secondary electron (SE) imaging at room temperature.Effect of different parameters including coating treatment,accelerating voltage,the spot changes,scanning speed,working distance,etc.,on image quality was investigated. |
| Key words: image quality SiO2 micro-ball coating treatment accelerating voltage beam spot scanning speed working distance |
