| 引用本文： |
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蒙庆华,李一凡,樊东鑫.MEMS技术发展及其在生物芯片中的应用概述[J].广西科学院学报,2010,26(4):528-531. [点击复制]
- MENG Qing-hua,LI Yi-fan,FAN Dong-xin.Overview of MEMS Technology Development and Its Application in Biochips[J].Journal of Guangxi Academy of Sciences,2010,26(4):528-531. [点击复制]
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| 摘要: |
| 介绍微机电系统(MEMS)的技术发展概况以及MEMS在生物芯片中的应用,并对MEMS在生物芯片中的未来发展趋势进行展望。MEMS的发展极大地推动了生物芯片的发展,建议对MEMS在生物芯片中的应用进行更加系统深入的研究。 |
| 关键词: 微机电系统 微电子技术 生物芯片 传感器 |
| DOI： |
| 投稿时间：2010-04-19修订日期：2010-07-23 |
| 基金项目:广西师范学院教师前期基础研究基金项目(桂师院科字(2010)3号),广西教育厅项目(201010LX291)资助。 |
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| Overview of MEMS Technology Development and Its Application in Biochips |
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MENG Qing-hua, LI Yi-fan, FAN Dong-xin
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| (College of Physics and Electronic Engineering, Guangxi Teachers Education University, Nanning, Guangxi, 530023, China) |
| Abstract: |
| The development and application of MEMS technology in Biochips were described and the future development of MEMS in biochips was prospected.The development of MEMS has greatly promoted the development of biochips. A more systematic study should be carried out on the application of MEMS in biochips. |
| Key words: micro electro mechanical systems (MEMS) micro-electronic technology biochip sensors |
