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姜峰,谭泽旦,黄誓成,陆映东,覃立仁,曾纪术,方志杰.大尺寸氧化铟锡(ITO)靶材制备研究进展[J].广西科学,2022,29(6):1169-1177,1187. [点击复制]
- JIANG Feng,TAN Zedan,HUANG Shicheng,LU Yingdong,QIN Liren,ZENG Jishu,FANG Zhijie.Research Progress on Preparation of Large-size Indium Tin Oxide (ITO) Targets[J].Guangxi Sciences,2022,29(6):1169-1177,1187. [点击复制]
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| 大尺寸氧化铟锡(ITO)靶材制备研究进展 |
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姜峰1, 谭泽旦1,2, 黄誓成2, 陆映东2, 覃立仁1, 曾纪术3, 方志杰3
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| (1.广西科技大学机械与汽车工程学院, 广西柳州 545616;2.广西晶联光电材料有限责任公司, 广西柳州 545036;3.广西科技大学微电子与材料工程学院, 广西柳州 545006) |
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| 摘要: |
| 氧化铟锡(Indium Tin Oxide，ITO)靶材是屏幕显示器、光伏电池、功能玻璃等领域的关键原材料之一，已朝着大尺寸(长度至少600 mm)、高密度、低电阻率和高使用率的方向发展。本文介绍了高性能ITO靶材的技术特征，分析了大尺寸ITO靶材的需求和镀膜优势，总结了大尺寸ITO靶材的成型、烧结工艺及其研究应用现状，最后提出了制备大尺寸ITO靶材的研究方向。 |
| 关键词: 氧化铟锡(ITO) 大尺寸靶材 制备 成型工艺 烧结工艺 |
| DOI：10.13656/j.cnki.gxkx.20230110.017 |
| 投稿时间：2021-12-27修订日期：2022-02-18 |
| 基金项目:国家自然科学基金项目(11864005)，广西科技计划项目(桂科AD20159079)和柳州市科技计划项目(2020PAAA0608)资助。 |
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| Research Progress on Preparation of Large-size Indium Tin Oxide (ITO) Targets |
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JIANG Feng1, TAN Zedan1,2, HUANG Shicheng2, LU Yingdong2, QIN Liren1, ZENG Jishu3, FANG Zhijie3
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| (1.School of Mechanical and Automotive Engineering, Guangxi University of Science and Technology, Liuzhou, Guangxi, 545616, China;2.Guangxi Crystal Union Photoelectric Materials Co, Ltd, Liuzhou, Guangxi, 545036, China;3.School of Microelectronics and Materials Engineering, Guangxi University of Science and Technology, Liuzhou, Guangxi, 545006, China) |
| Abstract: |
| Indium Tin Oxide (ITO) target is one of the key raw materials in the fields of screen displays,photovoltaic cells,and functional glass.It has developed towards large size (at least 600 mm in length),high density,low resistivity,and high utilization.In this article,the technical characteristics of high-performance ITO targets are introduced,and the requirements and coating advantages of large-size ITO targets are analyzed.Meanwhile,the forming,sintering process of large-size ITO targets and its research and application status are summarized.Finally,the research directions for the preparation of large-size ITO targets are proposed. |
| Key words: Indium Tin Oxide (ITO) large-size target preparation forming process sintering process |
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